Applied Science and Engineering Progress

Kimura, Keiichi, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology, Iizuka, Fukuoka, Japan Presently, Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, 106 Taiwan

• Vol 7, No 3 (2014) - Research Articles
  Study on Variable Rotation Polishing Method in Chemical Mechanical Polishing Process
  Abstract  PDF